800FSA型光刻機(jī)系統(tǒng)

 

OAI 800FSA型光刻機(jī)是一種半自動(dòng)化的光學(xué)式頂面掩模對準(zhǔn)器。它提供超精密（1μm-2μm）對準(zhǔn)精度，并設(shè)計(jì)為以極具競爭力的價(jià)格大大超過任何可比的背面Aligner的性能。多功能800FSA型面罩Aligner非常適合用于小批量生產(chǎn)，研發(fā)實(shí)驗(yàn)室和大學(xué)。

800FSA型掩模對準(zhǔn)器可以配置多種OAI光源，功率高達(dá)2KW。掩模對準(zhǔn)器工具可容納高達(dá)8英寸正方形的基板，并且晶片卡盤被定位成允許容易地裝載和卸載。這種經(jīng)濟(jì)實(shí)惠的面罩對齊器具有電動(dòng)自動(dòng)調(diào)平和自動(dòng)間隙設(shè)置。

建立在振動(dòng)隔離平臺(tái)上，固定面罩支架組件保證對準(zhǔn)精度和重復(fù)性。使用易于讀取的PLC觸摸屏簡化操作。培訓(xùn)時(shí)間短;操作者可以在不到一小時(shí)內(nèi)有效地學(xué)習(xí)使用面罩對準(zhǔn)器。

Model 800FSA Topside Mask Aligner System

The OAI Model 800FSA Mask Aligner is a semi-automated, optical Topside mask Aligner. It delivers ultra-precise (1µm-2µm) alignment accuracy and is designed to greatly surpass the performance of any comparable backside Aligner at an extremely competitive price. The versatile Model 800FSA mask Aligner is ideal for use in low volume production, R&D labs, and universities.

The Model 800FSA Mask Aligner can be configured with a wide variety of OAI light sources that range in power up to 2KW. The mask Aligner tooling can accommodate substrates up to 8-inch square, and the wafer chuck is positioned to allow for easy loading and unloading. This cost-effective mask Aligner features motorized auto leveling and auto gap setting.

Built on a vibration isolation platform, the fixed mask holder assembly guarantees alignment accuracy and repeatability. Operation is simplified using the easy-to-read, PLC touch-screen. Training time is short; an operator can learn to use the mask Aligner effectively in less than one hour.